Exposure apparatus, and device production method

ABSTRACT

A gas supply path structure forms a fluid path for allowing a laser gas to flow into or out of a pair of fluid inlet and outlet  11   a  and a laser gas is controlled to a predetermined subsonic speed at a throat portion. Gas supplies for controlling the speed of the gas are connected each to the fluid inlet and to the fluid outlet of the gas supply path structure and, together with a cooling device, compose a circulation system for controlling the speed and pressure of the laser gas at the fluid inlet and/or at the fluid outlet.

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention relates to a gas supply path structure anda gas supply method adapted in such a way that a fluid path is formedfor a compressible fluid (mainly, compressible gas) to flow into or outof the path and that the fluid is ejected from a predetermined portionmidway of the fluid path and, particularly, this gas supply pathstructure is suitably applicable to a laser oscillating apparatus usingit for supply of a laser gas, an exposure apparatus having the laseroscillating apparatus as a component, and a device production methodtherewith.

[0003] 2. Related Background Art

[0004] In recent years so-called excimer lasers are drawing attention ashigh output lasers only which can be oscillated in the ultravioletregion, and they are expected to be applied in the electronicsindustries, chemical industries, energy industries, etc., specifically,to processing, chemical reaction, etc. of metal, resin, glass, ceramics,semiconductors, and so on.

[0005] The functional principles of excimer laser oscillating apparatuswill be described. First, a laser gas of Ar, Kr, Ne, F₂, He, Xe, Cl₂, orthe like filled in a laser tube is brought into an excited state byelectron beam irradiation, discharge, or the like. In the case of theKrF excimer laser, for example, the excited F atoms are coupled withinactive Kr atoms being in the ground state to create KrF, which ismolecules existing only in the excited state. These molecules are calledexcimers. The excimers are instable and soon emit ultraviolet light tofall into the ground state. This phenomenon is called spontaneousemission and the excimer laser oscillating apparatus is one making usethereof so as to amplify the emitted light into phase-aligned light inan optical resonator composed of a pair of reflectors and take it out inthe form of a laser beam.

[0006] The excimer laser oscillating apparatus is becoming themainstream of light sources used in various modern industries on onehand and has the problem of extremely short light emission time due toexhaustion of the laser gas with light emission on the other hand.Namely, particularly in the case of the KrF laser, the ArF laser, andthe F₂ laser among the excimer lasers, it is not easy to maintain thelight emission over a long time, because a relatively long time isnecessary for return from the state of light emission of the excitedmolecules to the original state of F₂ molecules.

[0007] In order to extend the light emission time by replenishment withthe laser gas, it is necessary to always supply the laser gas at highspeed. Generation of gas flow at high speed, however, can result informing a shock wave, which could cause incapability of functioning as alaser oscillating apparatus; specifically, it could cause an offset ofthe optical axis of laser, loosening of joints for the laser gas,breakage of ceramics, metal fatigue, and so on. For example, whenexposure or the like is carried out, vibration caused by the shock wavewill be fatal disturbance rather than the above.

SUMMARY OF THE INVENTION

[0008] The present invention has been accomplished in view of the aboveproblem and an object of the present invention is to provide a gassupply path structure (and a gas supply method) that can suppressoccurrence of the shock wave while forming the gas flow at high speedclose to the sound speed in simple structure. A further object of thepresent invention is to provide a laser oscillating apparatus with longemission time equipped with the gas supply path structure, an exposureapparatus with high performance equipped with the laser oscillatingapparatus, and a method for producing a high-quality device by use ofthe exposure apparatus.

[0009] A compressible fluid supply path structure according to thepresent invention is a compressible fluid supply path structure, saidcompressible fluid supply path structure being of a convergent-divergentnozzle type,

[0010] said compressible fluid supply path structure comprising:

[0011] a fluid inlet into which a compressible fluid is made to flow;

[0012] a throat portion for controlling said compressible fluid to aspeed less than a sound speed;

[0013] a fluid outlet of which said compressible fluid is made to flowout; and

[0014] a circulation system for circulating said compressible fluidflowing out of said fluid outlet into said fluid inlet.

[0015] The compressible fluid supply path structure may be constructedin either one of the following configurations:

[0016] a ratio of a pressure at said fluid inlet to a pressure at saidfluid outlet is not less than a ratio of critical pressures;

[0017] the compressible fluid supply path structure is shaped so as todecrease disturbance caused by said compressible fluid;

[0018] the compressible fluid supply path structure is a structurewithout an inflection point;

[0019] the compressible fluid supply path structure further comprises atleast one pressure correcting means for correcting a pressure at saidfluid inlet or at said fluid outlet;

[0020] the correction for the pressure by said pressure correcting meansis carried out near said fluid inlet;

[0021] the compressible fluid supply path structure further comprises atleast one temperature correcting means for correcting a temperature atsaid fluid inlet or at said fluid outlet;

[0022] said temperature correcting means has a cooling function and saidcooling is effected near said fluid outlet;

[0023] the compressible fluid supply path structure further comprisesvertical width adjusting means for adjusting a vertical width of saidthroat portion;

[0024] the compressible fluid supply path structure is symmetric withrespect to said throat portion at the center.

[0025] Another compressible fluid supply path structure according to thepresent invention is a compressible fluid supply path structurecomprising:

[0026] a fluid inlet into which a compressible fluid is made to flow;

[0027] a predetermined portion for controlling said compressible fluidto a speed less than a sound speed;

[0028] a fluid outlet of which said compressible fluid is made to flowout;

[0029] at least one temperature correcting means for correcting atemperature at said fluid inlet or at said fluid outlet; and

[0030] a circulation system for circulating said compressible fluidflowing out of said fluid outlet into said fluid inlet.

[0031] The above compressible fluid supply path structure may beconstructed so that said temperature correcting means has a coolingfunction and so that said cooling is effected near said fluid outlet.

[0032] A compressible fluid supply method according to the presentinvention is a compressible fluid supply method comprising:

[0033] a step of making a compressible fluid flow into a fluid inlet ofa compressible fluid supply path structure of a convergent-divergentnozzle type;

[0034] a step of controlling said compressible fluid to a speed lessthan a sound speed, at a throat portion of said compressible fluidsupply path structure;

[0035] a step of making said compressible fluid flow out of a fluidoutlet of said compressible fluid supply path structure; and

[0036] a circulation step of circulating said compressible fluid flowingout of said fluid outlet, into said fluid inlet by a circulation system.

[0037] In the above compressible fluid supply method, said compressiblefluid supply path structure may be arranged so that a ratio of apressure at said fluid inlet to a pressure at said fluid outlet is notless than a ratio of critical pressures.

[0038] Another compressible fluid supply method according to the presentinvention is a compressible fluid supply method comprising:

[0039] a step of making a compressible fluid flow into a fluid inlet ofa compressible fluid supply path structure;

[0040] a step of controlling said compressible fluid to a speed lessthan a sound speed, at a predetermined portion of said compressiblefluid supply path structure;

[0041] a step of making said compressible fluid flow out of a fluidoutlet of said compressible fluid supply path structure;

[0042] a step of correcting at least one of temperatures at said fluidinlet and at said fluid outlet by temperature correcting means of saidcompressible fluid supply path structure; and

[0043] a circulation step of circulating said compressible fluid flowingout of said fluid outlet, into said fluid inlet by a circulation system.

[0044] In the above compressible fluid supply method, said temperaturecorrecting means may have a cooling function and said cooling may beeffected near said fluid outlet.

[0045] A laser oscillating apparatus according to the present inventionis a laser oscillating apparatus comprising:

[0046] a gas supply path structure for supplying a laser gas, said gassupply path structure being of a convergent-divergent nozzle type,

[0047] said gas supply path structure comprising:

[0048] a fluid inlet into which said laser gas is made to flow;

[0049] a throat portion for controlling said laser gas to a speed lessthan a sound speed; and

[0050] a fluid outlet of which said laser gas is made to flow out.

[0051] The laser oscillating apparatus may be constructed in either oneof the following configurations:

[0052] said gas supply path structure further comprises a circulationsystem for circulating said laser gas flowing out of said fluid outlet,into said fluid inlet;

[0053] said gas supply path structure is arranged so that a ratio of apressure at said fluid inlet to a pressure at said fluid outlet is notless than a ratio of critical pressures;

[0054] said laser gas is an excimer laser gas which is a mixture of F₂gas with at least one inert gas selected from Kr, Ar, Ne, and He;

[0055] said gas supply path structure is a structure without aninflection point;

[0056] said gas supply path structure further comprises at least onepressure correcting means for correcting a pressure at said fluid inletor at said fluid outlet;

[0057] said gas supply path structure further comprises at least onetemperature correcting means for correcting a temperature at said fluidinlet or at said fluid outlet;

[0058] said temperature correcting means has a cooling function and saidcooling is effected near said fluid outlet;

[0059] said gas supply path structure further comprises vertical widthadjusting means for adjusting a vertical width of said throat portion;

[0060] said circulation system is comprised of at least one bellowspump;

[0061] said circulation system is comprised of at least one circulatingpump;

[0062] said circulation system is comprised of at least one blower;

[0063] said circulation system is comprised of at least one Sirocco fan.

[0064] Another laser oscillating apparatus according to the presentinvention is a laser oscillating apparatus comprising:

[0065] a gas supply path structure group for supplying a laser gas, saidgas supply path structure group being of a shape of gas supply pathstructures of a convergent-divergent nozzle type connected in series,

[0066] said gas supply path structure group comprising:

[0067] a fluid inlet into which said laser gas is made to flow;

[0068] a central part for controlling said laser gas to a speed greaterthan a sound speed; and

[0069] a fluid outlet of which said laser gas is made to flow out.

[0070] The above laser oscillating apparatus may be constructed ineither one of the following configurations:

[0071] said gas supply path structure group further comprises acirculation system for circulating said laser gas flowing out of saidfluid outlet, into said fluid inlet;

[0072] said laser gas is an excimer laser gas which is a mixture of F₂gas with at least one inert gas selected from Kr, Ar, Ne, and He;

[0073] said gas supply path structure group is a structure without aninflection point;

[0074] said gas supply path structure group further comprises at leastone pressure correcting means for correcting a pressure at said fluidinlet or at said fluid outlet

[0075] said gas supply path structure group further comprises at leastone temperature correcting means for correcting a temperature at saidfluid inlet or at said fluid outlet;

[0076] said gas supply path structure group further comprises verticalwidth adjusting means for adjusting a vertical width of said centralportion;

[0077] said circulation system is comprised of at least one bellowspump;

[0078] said circulation system is comprised of at least one circulatingpump;

[0079] said circulation system is comprised of at least one blower;

[0080] said circulation system is comprised of at least one Sirocco fan.

[0081] An exposure apparatus according to the present invention is anexposure apparatus comprising:

[0082] a laser oscillating apparatus, said laser oscillating apparatusgenerating illumination light,

[0083] said laser oscillating apparatus comprising a gas supply pathstructure for supplying a laser gas, said gas supply path structurebeing of a convergent-divergent nozzle type,

[0084] said gas supply path structure comprising:

[0085] a fluid inlet into which said laser gas is made to flow;

[0086] a throat portion for controlling said laser gas to a speed lessthan a sound speed; and

[0087] a fluid outlet of which said laser gas is made to flow out,

[0088] a first optical system for radiating said illumination light fromsaid laser oscillating apparatus onto a reticle in which a predeterminedpattern is formed; and

[0089] a second optical system for radiating said illumination lighthaving passed through said reticle, onto a surface to be irradiated.

[0090] Another exposure apparatus according to the present invention isan exposure apparatus comprising:

[0091] a laser oscillating apparatus, said laser oscillating apparatusgenerating illumination light,

[0092] said laser oscillating apparatus comprising a gas supply pathstructure group for supplying a laser gas, said gas supply pathstructure group being of a shape comprised of gas supply path structuresof a convergent-divergent nozzle type connected in series,

[0093] said gas supply path structure group comprising:

[0094] a fluid inlet into which said laser gas is made to flow;

[0095] a central part for controlling said laser gas to a speed greaterthan a sound speed; and

[0096] a fluid outlet of which said laser gas is made to flow out,

[0097] a first optical system for radiating said illumination light fromsaid laser oscillating apparatus onto a reticle in which a predeterminedpattern is formed; and

[0098] a second optical system for radiating said illumination lighthaving passed through said reticle, onto a surface to be irradiated.

[0099] A device production method according to the present invention isa method for producing a device, said method comprising:

[0100] a step of coating a surface to be irradiated, with aphotosensitive material;

[0101] a step of effecting exposure of a predetermined pattern in saidsurface to be irradiated, coated with said photosensitive material,using the exposure apparatus as stated above; and

[0102] a step of developing said photosensitive material on said surfaceafter the exposure.

[0103] The above device production method may be arranged so that saidsurface to be irradiated is a wafer surface and so that a semiconductorelement is formed on said wafer surface.

[0104] Other features and advantages of the present invention will beapparent from the following description taken in conjunction with theaccompanying drawings, in which like reference characters designate thesame or similar parts throughout the figures thereof.

BRIEF DESCRIPTION OF THE DRAWINGS

[0105] The accompanying drawings, which are incorporated in andconstitute a part of the specification, illustrate embodiments of theinvention and, together with the description, serve to explain theprinciples of the invention.

[0106]FIG. 1 is a schematic diagram to show the principal structure ofthe excimer laser oscillating apparatus according to the firstembodiment;

[0107]FIGS. 2A and 2B are drawings to show a different form from FIG. 1in the first embodiment;

[0108]FIG. 3 is a schematic diagram to show the principal structure ofthe excimer laser oscillating apparatus according to the firstembodiment;

[0109]FIG. 4 is a schematic diagram to show a vertical width adjustingmechanism provided in a throat portion of the gas supply path structure;

[0110]FIG. 5 is a characteristic diagram to show the relation between(cross-sectional area of fluid outlet/cross-sectional area of throatportion) and (pressure at fluid outlet/pressure at fluid inlet) in thegas supply path structure;

[0111]FIG. 6 is a diagram to show the relation of conditions to gasvelocity, Mach number, gas pressure, gas density, gas temperature, andsound speed at each of portions (fluid inlet, throat portion, fluidoutlet) of the gas supply path structure;

[0112]FIG. 7 is a characteristic diagram to show the relation between(pressure at throat portion/pressure at fluid inlet) and (velocity atthroat portion) in the gas supply path structure;

[0113]FIG. 8 is a characteristic diagram to show the relation between(pressure at an arbitrary point)/(pressure at the throat portion) and(temperature at an arbitrary point)/(temperature at the throat portion)in the gas supply path structure;

[0114]FIG. 9 is a block diagram to totally show the relation ofconditions in control of the gas supply path structure;

[0115]FIGS. 10A and 10B are cross-sectional views to show only the gassupply path structure of the excimer laser oscillating apparatus inModification 1 of the first embodiment;

[0116]FIG. 11 is a cross-sectional view to show only the gas supply pathstructure of the excimer laser oscillating apparatus in Modification 2of the first embodiment;

[0117]FIG. 12 is a diagram to show the relation of conditions to gasvelocity, Mach number, gas pressure, gas density, gas temperature, andsound speed at each of portions (fluid inlet, light emission portion,fluid outlet) of the gas supply path structure;

[0118]FIG. 13 is a cross-sectional side view to show the schematicstructure of the excimer laser oscillating apparatus in Modification 3of the first embodiment;

[0119]FIG. 14 is a cross-sectional side view to show another example ofthe gas supply path structure in Modification 3 of the first embodiment;

[0120]FIG. 15 is a schematic diagram to show a stepper of the secondembodiment;

[0121]FIG. 16 is a flowchart to show production steps of semiconductordevices using the stepper of the second embodiment; and

[0122]FIG. 17 is a flowchart to show the details of the wafer process inFIG. 16.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0123] Some specific embodiments as application of the present inventionwill be described in detail by reference to the drawings.

[0124] (First Embodiment)

[0125] The first embodiment will be described first. The presentembodiment is an example of the excimer laser oscillating apparatuswhich emits the so-called excimer laser light.

[0126]FIGS. 1, 2A, 2B and 3 are schematic diagrams to show the principalstructure of the excimer laser oscillating apparatus according to thepresent embodiment.

[0127] This excimer laser oscillating apparatus, as illustrated in FIGS.1, 2A, 2B and 3, is comprised of a laser chamber 1 to which an excimerlaser gas is supplied and which emits the laser light by exciting thelaser gas by discharge and resonating it, gas supply means 2 forsupplying the laser gas to the laser chamber 1, and a cooling device 3for cooling the laser gas heated. In the present example the laserchamber 1 is symmetric between the inlet and the outlet of gas, withconsideration to alternate change of flowing directions of the laser gasas described hereinafter.

[0128] Cooling of the laser gas is effected by supply of cooling waterto gas feed frame 28 of FIG. 1 and by provision of radiation fins 29 inthe gas supply means 2. The cooling device 3 does not have to beprovided separately, if a rise of temperature of the laser gas isrelatively small.

[0129] The excimer laser gas as a raw material in generation of theexcimer laser light is a mixture gas of F₂ gas and at least one inertgas selected from Kr, Ar, Ne, and He. Appropriate gas species may beselected and combined out of these species, depending upon a wavelengthdesired to use. For example, KrF is preferable in the case of generationof the laser light at the wavelength of 248 nm, ArF in the case of thewavelength of 193 nm, and F₂ in the case of the wavelength of 157 nm.Further, Kr₂ is preferable in the case of the wavelength of 147 nm, ArKrin the case of the wavelength of 134 nm, and Ar₂ in the case of thewavelength of 126 nm.

[0130] The laser chamber 1 is provided with a gas supply path structure11 functioning as a laser tube, which is of a so-calledconvergent-divergent nozzle (also called a laval nozzle) type as acombination of a convergent shape for accelerating the flow of the lasergas with a divergent shape for decelerating the flow of the laser gas,as illustrated in FIG. 2B, and a waveguide tube 12 for exciting thelaser gas in this gas supply path structure 11 into a plasma state.

[0131] The gas supply path structure 11 is a nozzle which forms a flowpath for allowing the laser gas to flow thereinto or out thereof througha pair of inlet/outlet ports 11 a, which is shaped so as to be narrowestat the central part, and which controls the laser gas to a predeterminedspeed less than the sound speed (the predetermined speed will bereferred to as subsonic speed) at the central part as describedhereinafter. Note that a speed greater than the sound speed will bereferred to as supersonic speed. Here the central part, where the flowvelocity of the laser gas reaches the subsonic speed, serves as a lightemitting portion 21 for emitting the laser light. As illustrated in FIG.3, a pair of reflecting structures 22, 23, which are mirrors, prisms, orthe like, are provided above and below this light emitting portion 21 inthe figure and these reflecting structures 22, 23 function to align thephase of the light emitted from the light emitting portion 21 togenerate the laser light. In the present embodiment the laser gas flowsin two directions, i.e., to the left and to the right, in the gas supplypath structure 11 and, therefore, the gas supply path structure 11 issymmetric with respect to the center. One of the inlet/outlet ports 11 aserves as a fluid inlet and the other as a fluid outlet, depending uponthe direction of the gas flow.

[0132] The height (vertical width) of the passage of the laser gas atthe light emitting portion 21 of this gas supply path structure 11 isfixed at a predetermined value in the example of FIG. 1 to FIG. 3, butthe apparatus may be provided with a vertical width adjuster 21 a formaking the height of the light emitting portion 21 variable, forexample, as illustrated in FIG. 4. This vertical width adjuster 21 a isa pair of members arranged so as to be variable in vertical directions,which are opposed to each other so as to define the height of the lightemitting portion 21 at a predetermined value. The height may also beregulated by placing a detachable spacer at the light emitting portion21, instead of this vertical width adjuster 21 a. A different gas supplypath structure may also be realized by replacing the nozzle part withanother.

[0133] The waveguide tube 12 is a means for supplying a microwave to thelaser gas in the gas supply path structure 11 and a plurality ofelongate slots are formed in the bottom portion. When the microwave isguided from the upper part of the waveguide tube 12, the microwavepropagates in the waveguide tube 12 to be radiated through the slots 24to the outside of the waveguide tube 12. The microwave thus radiated isguided through the slots 24 provided in the gas supply path structure 11into the gas supply path structure 11. The microwave thus guided intothe gas supply path structure excites the laser gas in the supply pathstructure 11 to generate the excimer laser light. A RF (radio-frequency)preionization discharge electrode 30 is provided in each oflow-conductance portions 27 described hereinafter.

[0134] The specific function of the gas supply path structure 11 will bedescribed herein. For convenience' sake of explanation, analysis is madeon the basis of the presumption that the laser gas is a compressible gasand a perfect, ideal gas and that the flow is steady, one-dimensional,isentropic flow.

[0135] The following is the basic equations for the perfect, ideal gasand the isentropic, one-dimensional, steady flow thereof.

Aρv=A*(γP*/ρ*)^(½)  (1)

{γ/(γ−1)}·(P/ρ)+(½)v ²=[γ(γ+1)/{2(γ−1)}]·(P*/ρ*)={γ/(γ−1)}·(P_(in)/ρ_(in))  (2)

Pρ ^(−γ)=const  (3)

PV=nRT  (4)

[0136] Eq. (1) is the equation of continuity, Eq. (2) the Bernoulliequation of the isentropic flow, Eq. (3) the adiabatic law of perfect,ideal gas, and Eq. (4) the equation of state of perfect, ideal gas. Inthese equations ρ represents the density, P the pressure, v thevelocity, T the temperature, and A the cross-sectional area. Themeanings of subscripts are defined as follows; a character without anysubscript represents a value at an arbitrary point in the gas supplypath structure 11, a character with subscript “in” a value at the fluidinlet, a character with subscript “out” a value at the fluid outlet, acharacter with subscript “throut” a value at the throat portion, and acharacter with subscript “*” a value at a virtual critical point atwhich the velocity of the gas flow becomes equal to a local sound speed.Further, γ represents a ratio of specific heats, V the volume, n thenumber of moles, and R the gas constant.

[0137] At this time the structure of the gas supply path structure 11 isof the convergent-divergent nozzle type and the following equation isderived from the above four equations.

A _(out) /A _(throut)=[{(γ−1)/2}·{2/(γ+1)}^((γ+1)/(γ−1))/{(P _(out) /P_(in))^(2/γ−)(P _(out) /P _(in))^((γ+1)/γ)}]^(½)  (5)

[0138] In this structure, when the speed of the gas flow at the throatportion 21 reaches a speed greater than the sound speed, there almostalways occurs the shock wave at the fluid outlet. In the presentembodiment a ratio of pressures at the fluid inlet and at the fluidoutlet of the gas in the gas supply path structure 11 is kept not lessthan a ratio of critical pressures determined by P_(out)/P_(in)satisfying Eq. (5) so that the velocity of the gas at the throat portion21 becomes the subsonic speed. Namely, the following relation holdswhere P′_(out) out indicates an actually set pressure at the fluidoutlet.

P _(out/) P _(in) ≦P′ _(out) /P _(in)  (6)

[0139] Further, the following relation holds when it is assumed hereinthat the gas flows in one direction.

P _(out) /P _(in) ≦P′ _(out) /P _(in)<1  (7)

[0140] When the gas supply path structure 11 is used as a laser tubewhere the velocity of the gas is the subsonic speed everywhere, it ispreferable to use the throat portion as a laser emitting portion.

[0141]FIG. 5 is a characteristic diagram to show the relation between(cross-sectional area of the fluid outlet/cross-sectional area of thethroat portion) and (pressure at the fluid outlet/pressure at the fluidinlet). Since the excimer laser gas is composed mostly of monoatomicgas, the ratio of specific heats γ is assumed to be 5/3. It is a matterof course that an average ratio of specific heats may also be used.Referring to FIG. 5, for example, supposing that the height at the fluidoutlet (the vertical width of the fluid outlet) is double the height ofthe throat portion 21 (the vertical width of the narrowest part) (i.e.,supposing a ratio of spatial cross-sectional areas of them is 2), thespeed of the gas flow will not exceed the sound speed, so as not tocause the shock wave, when the pressure at the fluid outlet is not lessthan about 0.93 times the pressure at the fluid inlet. For reference thegas speed at the throat portion 21 in the critical state is the soundspeed.

[0142] The sound speed of the gas is a function of gas temperature. Inthe case of the KrF excimer laser gas, for example, supposing that amixture ratio of gases is Ne:Kr:F₂=94.9:5:0.1 and assuming that themixed gas is an ideal gas having the mean molecular weight M(Ne:20.18/Kr:83.8/F₂:38) of 23.4, the sound speed a is expressed by thefollowing equation.

a=(γRT/M)^(½)  (8)

[0143] Therefore, the sound speed at each temperature is given by Table1 below. TABLE 1 Gas temperature Sound speed ° C. K m/sec −100  173.15320.4  0 273.15 402.4  25 298.15 420.4 100 373.15 470.3 200 473.15 529.6300 573.15 582.9

[0144] It is assumed herein that R is the gas constant, T absolutetemperatures (K), and the ratio of specific heats γ same as that ofmonoatomic molecules. It is thus seen from this relation that it is notdesirable to actively decrease the temperature of the inflow gas in thecase of gas replacement at higher speeds. Conversely speaking, there arealso cases wherein it is rather desirable to heat the laser gas forhigh-speed replacement at or below the subsonic speed. For the samereason, it is suggested that cooling of the laser gas, if conducted,should be effected on the outlet side of the gas.

[0145]FIG. 6 shows the relation of the conditions to the velocity, Machnumber, gas pressure, gas density, gas temperature, and sound speed ateach of the portions (fluid inlet, throat portion, fluid outlet) of thegas supply path structure 11.

[0146] In this FIG. 6, block A indicates variations of theaforementioned conditions from the fluid inlet to the throat portion 21against the velocity (subsonic speed or supersonic speed) on side of thefluid inlet, while block B indicates variations of the aforementionedconditions from the throat portion 21 to the fluid outlet against thevelocity (subsonic speed or supersonic speed) on side of the fluidoutlet. When the velocity at the fluid inlet is the subsonic speed, thegas velocity thus increases with decrease in the distance to the throatportion 21 and reaches the maximum velocity at the throat portion 21. Ifthis maximum velocity is the subsonic speed, the gas velocity willdecrease with decrease in the distance to the fluid outlet. By using thegas supply path structure 11 of the convergent-divergent nozzle type asa laser chamber and adjusting the temperature and pressure at eachportion in this way, it becomes possible to control the gas velocity atthe throat portion 21 to the subsonic speed greater than those at thefluid inlet and at the fluid outlet.

[0147] If in the shape of the gas supply path structure 11 there existsan inflection point such as sudden expansion or sudden contraction orthe like, there is a possibility that a region at or over the soundspeed is formed in a portion except for the throat portion 21.Therefore, the gas supply path structure 11 is desirably shaped so as toexpand (or contract) relatively gently without a suddenly expandingportion.

[0148] The following will describe specific condition setting or thelike for controlling the velocity at the throat portion 21 at thesubsonic speed as described above, referring to FIG. 9.

[0149] The flow rate of the gas at the throat portion 21 depends uponthe pressure at the inlet, as indicated by Eq. (9) below. In theequation f represents the flow rate of the gas at the throat portion 21and P_(throut) the pressure thereof. In this case, the relation between(pressure at the inlet/pressure at the throat portion) and (velocity atthe throat portion) is as illustrated in FIG. 7.

f=P _(in)/(RT _(in))^(½)·[{2γ/(γ−1)}·{(P _(throut) /P _(in))²/γ−(P_(throut) /P _(in))^((γ+1)/γ)}]^(½)/(P _(throut) /P _(in))^(1/γ)  (9)

[0150] It is seen from FIG. 7 that the velocity at the throat portion 21can be controlled to 300 (m/s) by setting the pressure at the inlet to1.67 (atm) and the pressure at the throat portion to 1 (atm). From theaforementioned consideration with FIG. 5, where the ratio ofcross-sectional areas of the fluid inlet and the throat portion 21 is 2,the pressure at the outlet needs to be 1.56 (atm).

[0151] Since the pressure is relatively low at the outlet, it isexpected that variation amounts at the outlet are greater than those inadjustment of the pressure at the inlet. It is thus preferable that thecharging pressure of the laser gas be set to the pressure at the fluidoutlet, the pressure at the inlet be kept up, and then the pressure atthe outlet be kept constant.

[0152] Since the critical condition is not employed in practicalsystems, the calculation according to Eq. (5) may also be carried outwith the following substitution; A_(throut) →A*, P_(out) →P, A_(out) →A(where A* is the cross-sectional area at the virtual critical point andP and A are the pressure and cross-sectional area at an arbitrarypoint).

[0153] Further, the following equation holds where T_(in) is the gastemperature at the fluid inlet, T the gas temperature at the arbitrarypoint, and P the gas pressure at the arbitrary point. In this case, therelation between (pressure at the arbitrary point/pressure at the throatportion) and (temperature at the arbitrary point/temperature at thethroat portion) is as illustrated in FIG. 8.

T=T _(in)(P/P _(in))^((γ+1)/γ)  (10)

[0154] At this time, for example, supposing that the gas temperature atthe inlet is 25° C. and that the state is adiabatic, the temperature atthe light emitting portion is −30.3° C. and the gas temperature at theoutlet is 16.9° C.

[0155] There are cases wherein unexpected variation occurs in theaforementioned conditions because of friction caused by the flow of thelaser gas or heatup at the throat portion 21. It is thus desirable torealize the shape that can lessen the friction; specifically, thesurface of the gas supply path structure 11 is formed, for example, as asurface with high flatness or the surface is formed in structure withoutan inflection point (in smooth surface structure) by decreasing physicalsurface roughness by mechanical polishing, electrochemical buffing, orthe like. At this time, in order to correct the ratio of criticalpressures or the pressure at the fluid inlet in response to a rise oftemperature occurring in the flow path (mainly, in the throat portion21) of the gas supply path structure 11, it is preferable to monitor,for example, the temperature at the throat portion 21 (or monitor thevelocity of gas at the throat portion 21 indirectly) and provide thesystem with a correcting means for finely adjusting the pressure at theinlet and/or the pressure at the outlet. It can be contemplated that thespecific function of the correcting means is to increase the pressure atthe outlet when the velocity of gas is low at the throat portion 21, forexample.

[0156] The relation of the conditions as described above is totallyillustrated in FIG. 9. As illustrated, for example, where the pressureat the throat portion is desired to be set to 1 (atm) and the velocityof the gas at the throat portion to 300 (m/s), the pressure at the inletis set to 1.67 (atm). In addition, where (the cross-sectional area ofthe throat portion/the cross-sectional area of the fluid inlet) isdesigned to be ½ and if the aforementioned friction is decreased to anegligible level, the pressure at the outlet is set to 1.56 (atm). Whenthese specific conditions are adopted, the velocity at the throatportion 21 can be controlled to a subsonic speed greater than the gasvelocities at the inlet and at the outlet, specifically to 300 (m/s)herein as described above, while suppressing occurrence of the shockwave.

[0157] Each gas supply 2 is connected to either of the fluid inlet andthe fluid outlet of the gas supply path structure 11 and they, togetherwith the cooling device 3, compose a circulation system, which controlseach of the velocity and pressure of the excimer laser gas at the inletand/or at the outlet as described above. In this example each gas supply2 is composed of a plurality of bellows pumps 25 coupled in a matrix.

[0158] Each bellows pump 25, as illustrated in FIG. 2A, is composed of along-life bellows portion 25 a which can expand and contract, and aservomotor 25 b which carries out a quick and precise operation foradjusting expansion/contraction of this bellows portion 25 a. Supposinghere that the cross-sectional area of the throat portion 21 is, forexample, 250 mm×2 mm (=5×10⁻⁴ m²), the necessary gas flow rate at thethroat portion 21 is 0.11 m³/s (=6.61 m³/min). Assuming that theoperating time of the bellows pump 25 is 0.2 s (or that the exposuretime is 0.1 s), a volume of the gas pushed out every time by the bellowspump 25 is 2.21×10⁻² m³ or 2.30×10⁻² m³ at the inlet or at the outlet,respectively. Since a standard block telescopic volume (a volumeresulting from subtraction of a volume at the shortest stroke from avolume at a longest stroke) of the long-life bellows pump 25 having theinside diameter of 50 mm is 0.115×10³ m³, the bellows pumps 25necessitated are 200 blocks or so. In this example, taking the volumefor the initial operation, a guide path, etc. into consideration, thebellows pumps 25 of 210 blocks are prepared on each side. Since at mostfive blocks of bellows pumps 25 can be connected in series vertically,there are upper and lower arrays in a matrix composed of twenty onecells of bellows pumps 25 each cell comprising five blocks, operating insymmetry, as illustrated in FIG. 1 and FIG. 3, thus composing each gassupply 2.

[0159] The bellows portion 25 a is formed in such heat-radiatingstructure as to match with the shape at the shortest stroke. Thisstructure is desirably cylindrical in a sense of decreasing the gascontact area and the outer surface of the bellows portion 25 a isdesirably provided with fin structure 29 for increasing the heatradiation area. If the rise of the temperature of the laser gas is notnegligible, it can be handled by also providing the inner surface of thebellows portion 25 a with the fin structure.

[0160] Since the bellows pumps 25 are arranged in series as describedabove, the atmospheric pressure outside the bellows pumps 25 ispreferably set to a pressure higher than the pressure inside the bellowspumps 25 in consideration of prevention of buckling.

[0161] In order to increase work efficiency of the bellows pumps 25, itis necessary to control the volume of the supply system from the bellowspumps 25 to the throat portion 21 to the minimum. Thus, as illustratedin FIG. 3, hollow fluid paths 26 having the diameter φ of about 4 mm,for example, are provided so as to couple each bellows pump 25 to thethroat portion 21. Further, the system is provided with thelow-conductance portion and the RF preionization discharge electrode forforming the uniform gas flow in the vicinity of the throat portion 21.These low-conductance portion and RF preionization discharge electrodecan be constructed as a spatially common member and they are representedas an integral member of the low-conductance part 27 in the illustratedexample. In this example the low-conductance part 27 is, for example, 50mm to 100 mm long and 4 mm high and the throat portion 21 is about 4 mmlong and 2 mm high.

[0162] The cooling device 3 is connected to each gas supply 2 and hasthe function of cooling the laser gas. This cooling device 3, the gassupplies 2, and the gas supply path structure 11 compose a gascirculation system and the flowing directions of the laser gas arealternated by actuation of the bellows pumps 25 of the gas supplies 2. Apreferred cooling method of the laser gas by the cooling device 3 is away of cooling the heated laser gas after passage through the gas supplypath structure 11. This is for the following reasons. If the laser gasis preliminarily cooled before supply to the gas supply path structure11 the sound speed of the gas will be lowered so as to lower the upperlimit of the initial subsonic speed. If the laser gas is cooled duringacceleration thereof the velocity of the gas will be lowered.

[0163] In FIG. 2A the cooling device 3 is placed separately from the gassupply path structure 11 and the gas supplies 2, but it is also possibleto cool the laser gas in the hollow fluid paths 26 in the feed passage28 of FIG. 1, depending upon circumstances, as described previously.Further, it is needless to mention that the heat radiation fins 29 ofthe bellows portions 25 a and the bellows portions 25 a themselves havethe function as a cooler.

[0164] Conversely, the preliminary heating of the laser gas is effectiveto increase of sound speed. However, heating, particularly, of thethroat portion 21 (also including heating due to the microwave) shouldbetter be avoided, because a choke phenomenon (an apparent decrease ofcross-sectional area due to heating) occurs so as to make it difficultto satisfy the designed gas flow rate, though it contributes to theincrease of the gas velocity. When this problem due to the heating ispronounced, the operating pressure of the bellows pumps 25 should bechanged, because it changes the substantial ratio of cross-sectionalareas.

[0165] As described above, the excimer laser oscillating apparatus ofthe first embodiment is arranged to set the pressure and velocity of thegas at the outlet and/or at the inlet and employs the gas supply pathstructure 11 of the convergent-divergent nozzle type in the laserchamber 1. This makes it possible to control the velocity of the excimerlaser gas in the light emitting portion 21 to the predetermined subsonicspeed while suppressing the occurrence of the shock wave, about whichconcern grows with proximity to the sound speed. The gas supply pathstructure can thus be replenished quickly with the excimer laser gas,which is apt to be exhausted, without concern about the occurrence ofthe shock wave. Therefore, the present embodiment realizes the excimerlaser oscillating apparatus that can maintain the stable light emissionover a long time.

[0166] Thanks to this totally simple structure, all the surfaces can besubjected to a surface treatment for suppressing degassing as impuritiesto the laser gas or a fluorine passivation treatment under a perfectcontrol of consumption of F₂ gas, which is also extremely effective toextension of the life of the laser gas.

[0167] Some modifications of the excimer laser oscillating apparatusaccording to the first embodiment will be described below. Each of themembers etc. described in the first embodiment will be denoted by thesame symbol and the description thereof will be omitted.

[0168] Modification 1

[0169] This excimer laser oscillating apparatus of Modification 1 hasthe structure approximately similar to that of the first embodiment, butis different in the shape of the portion corresponding to the gas supplypath structure. FIGS. 10A and 10B are cross-sectional side views to showonly the gas supply path structure of the excimer laser oscillatingapparatus of Modification 1.

[0170] A gas supply path structure group 31 is composed of a pair of gassupply path structures 11 connected in series (the size of theindividual gas supply path structures 11 can be different from the gassupply path structure 11 of the first embodiment), in which thefront-end gas supply path structure 11 serves as a supersonicacceleration portion 31 a, the post-end gas supply path structure 11 asa supersonic deceleration portion 31 b, and the central part as a lightemitting portion 32. In this gas supply path structure group 31 thevelocity of the gas at the light emitting portion 32 can be controlledto the supersonic speed by adjusting the gas velocity, the gas pressure,or the like at the inlet and/or at the outlet of the excimer laser gas,for example, by replacing P_(out) in Eq. (5) with a pressure P_(mid) atthe light emitting portion 32 of FIG. 10A and making a pressuredifference not less than the determined ratio of critical pressures.

[0171] With a pair of the aforementioned, predetermined portions havingthe narrowest width (the cross-sectional area of which is represented byAacc, Adef), the condition of Aacc<Adef needs to be satisfied at thestart herein. Therefore, where the gas flowing directions in the gassupply path structure group 31 are the two ways, the cross-sectionalareas Aacc, Adef have to be variable. In order to make variable theheight (vertical width) of the passage of the laser gas in the pair ofpredetermined portions of gas supply path structures 11, each of thepair of predetermined portions is provided with a vertical widthadjuster 33, for example, as illustrated in FIG. 10B. Each of thesevertical width adjusters 33 is composed, for example, of a pair ofmembers having a triangular sectional shape, whereby the vertical widthcan be changed by rocking the members on the fulcrum P.

[0172] As described above, the excimer laser oscillating apparatus ofModification 1 uses the paired gas supply path structure group 31 of theconvergent-divergent nozzle type in the laser chamber 1 and is arrangedto adjust the pressure and velocity of the gas at the inlet and/or atthe outlet, so that it can control the velocity of the excimer laser gasin the light emitting portion 32 to the predetermined supersonic speedwhile suppressing the occurrence of the shock wave, which can occurunder almost all the conditions over the sound speed. Therefore, the gassupply path structure group can be replenished quickly with the excimerlaser gas, which is apt to be exhausted, without concern about theoccurrence of the shock wave. Modification 1 can also realize theexcimer laser oscillating apparatus that can maintain the stable lightemission over a long time.

[0173] Modification 2

[0174] This excimer laser oscillating apparatus of Modification 2 hasthe structure approximately similar to that of the first embodiment butis different in the shape of the portion corresponding to the gas supplypath structure. FIG. 11 is a cross-sectional view to show only the gassupply path structure of the excimer laser oscillating apparatus ofModification 2.

[0175] In Modification 2 the gas supply path structure is a gas supplypath structure 41 having the constant height, which has been usedheretofore. A heating/cooling device 42 is placed at the inlet of thegas of the gas supply path structure 41 and a heating/cooling device 43at the outlet. FIG. 12 shows the relation of the conditions to thevelocity, Mach number, gas pressure, gas density, gas temperature, andsound speed at each of the portions (the inlet, the light emittingportion, the outlet) of the gas supply path structure 41, where theinlet of gas is heated while the outlet is cooled, ignoring occurrenceof friction due to the gas flow inside the gas supply path structure 41.

[0176] In this FIG. 12, similar to FIG. 6 described in the firstembodiment, block A represents variations of the aforementionedconditions from the inlet to the light emitting portion (which isassumed to exist near the central part herein) against the velocity(subsonic speed or supersonic speed) on side of the inlet and block Brepresents variations of the aforementioned conditions from the lightemitting portion to the outlet against the velocity (subsonic speed orsupersonic speed) on side of the outlet. For example, supposing thevelocity at the inlet is the subsonic speed and the inlet is heated bythe heating/cooling device 42, the velocity of the gas increases to themaximum at the light emitting portion. Supposing this maximum speed isthe subsonic speed and the outlet is cooled, the velocity of the gasdecreases with decrease in the distance to the outlet. By employing thisgas supply path structure 41 for the laser chamber 1 and adjusting thetemperature and pressure at each of the portions, the velocity at thelight emitting portion can be controlled to the subsonic speed greaterthan the speeds at the inlet and at the outlet, while suppressing theoccurrence of the shock wave.

[0177] The excimer laser oscillating apparatus of Modification 2,however, needs high thermal energy for the control of the gas supplypath structure 41, and it is thus more practical to use it, for example,in combination with the gas supply path structure 11 in FIG. 2B or withthe gas supply path structure group 31 in FIG. 10A.

[0178] As described above, the excimer laser oscillating apparatus ofModification 2 employs the gas supply path structure 41 having theconstant height in the laser chamber 1 and is arranged to adjust thepressure and velocity of the gas at the inlet and/or at the outlet, sothat it can control the velocity of the excimer laser gas in the lightemitting portion to the predetermined subsonic speed, while suppressingthe occurrence of the shock wave, about which concern grows withproximity to the sound speed. Therefore, the gas supply path structurecan be replenished quickly with the excimer laser gas, which is apt tobe exhausted, without concern about the occurrence of the shock wave.The present modification can also realize the excimer laser oscillatingapparatus that can maintain the stable light emission over a long time.

[0179] Modification 3

[0180] This excimer laser oscillating apparatus of Modification 3 hasthe structure approximately similar to that of the first embodiment andis different in the shape of the portion corresponding to the gas supplymeans 2. FIG. 13 is a cross-sectional side view to show the schematicstructure of the excimer laser oscillating apparatus of Modification 3.

[0181] Modification 3 has the gas supply path structure 11 of theconvergent-divergent nozzle type in the laser chamber 1, similar to thefirst embodiment, but each gas supply means 51 is comprised of amultiblade fan (Sirocco fan), a blower, a circulating pump, or the like.Since the flowing direction of the excimer laser gas is thus regulatedto one direction, the gas supply path structure 11 does not always haveto be symmetric with respect to the center. It is thus better to use thegas supply path structure of the shape optimized for the shape of theacceleration nozzle at the inlet and for the shape of the decelerationnozzle at the outlet, for example as illustrated in FIG. 14, taking thecontrol of the gas velocity, the gas pressure, etc. at the inlet and atthe outlet into consideration.

[0182] As described above, the excimer laser oscillating apparatus ofModification 3 employs the gas supply path structure 11 of theconvergent-divergent nozzle type in the laser chamber 1 and is arrangedto adjust the gas pressure and the gas velocity at the inlet and/or atthe outlet, so that it can control the velocity of the excimer laser gasin the throat portion to the predetermined subsonic speed whilesuppressing the occurrence of the shock wave, about which concern growswith proximity to the sound speed. Therefore, the gas supply pathstructure can be replenished quickly with the excimer laser gas, whichis apt to be exhausted, without concern about the occurrence of theshock wave. The present modification can also realize the excimer laseroscillating apparatus that can maintain the stable light emission over along time.

[0183] In addition, the gas supply path structure does not always haveto be symmetric with respect to the center, and the restraint on theshape is thus relaxed, so as to permit use of gas supply path structuresin shapes according to various conditions.

[0184] The present embodiment and the modifications thereof showed theexamples of the excimer laser oscillating apparatus using the gas supplypath structure under the predetermined conditions, but it should benoted that the present invention is not limited to these. The gas supplypath structure has the excellent effect of capability of easily andsafely forming the gas flow at the subsonic speed close to the soundspeed without concern about the occurrence of the shock wave. Thepresent embodiment showed the excimer laser oscillating apparatus as anexample most requiring this effect, and it is needless to mention thatit can also be applied to other various devices and systems. Forexample, as stated in the present embodiment, the gas supply pathstructure 11 can also be applied to a variety of cooling devices, bymaking use of the effect in which use of the gas supply path structure11 permits the suddenly lowered temperature of gas at the light emittingportion to be realized under the conditions of the predeterminedpressure etc. while keeping the gas temperature at the inlet and at theoutlet, approximately at ordinary temperature.

[0185] The gas supply path structure is also suitably applicable to alldevices for high-speed gas cooling or replacement used in facilitiesrequiring low vibration, particularly, such as clean rooms, because theoccurrence of the shock wave is suppressed.

[0186] (Second Embodiment)

[0187] The second embodiment will be described below. The secondembodiment shows an example of the exposure apparatus (stepper) havingthe excimer laser oscillating apparatus described in the firstembodiment (and the modifications thereof) as a laser light source. FIG.15 is a schematic diagram to show the principal structure of thisstepper.

[0188] This stepper is comprised of an optical system 111 for radiatingillumination light to a reticle 101 in which a desired pattern is drawn,a projection optical system 112 to which the illumination light havingpassed through the reticle 101 is incident and which is for projectingthe pattern of the reticle 101 onto a surface of wafer 102 at ademagnification ratio, a wafer chuck 113 on which the wafer 102 ismounted and fixed, and a wafer stage 114 to which the wafer chuck 113 isfixed.

[0189] The optical system 111 is composed of the excimer laseroscillating apparatus 121 of the first embodiment as a light source foremitting the excimer laser light at high luminance as the illuminationlight, a beam shape converting device 122 for converting theillumination light from the light source 121 into a desired beam shape,an optical integrator 123 comprised of a plurality of cylindrical lensesor microlenses arranged two-dimensionally, a stop member 124 which canbe replaced with an arbitrary stop by means of an unrepresented switchand which is placed near the position of secondary light sources formedby the optical integrator 123, a condenser lens 125 for condensing theillumination light having passed through the stop member 124, a blind127 which is composed, for example, of four variable blades and which isplaced on a conjugate plane with the reticle 101 to determine anarbitrary illumination range on the surface of the reticle 101, animaging lens 128 for projecting the illumination light determined in thepredetermined shape by the blind 127 onto the surface of the reticle101, and a bending mirror 129 for reflecting the illumination light fromthe imaging lens 128 toward the reticle 101.

[0190] Now described is the operation for projecting the pattern of thereticle 101 onto the surface of the wafer 102 at the demagnificationratio, using the stepper constructed in the above structure.

[0191] First, the illumination light emitted from the light source 121is converted into the predetermined shape by the beam shape converter122 and thereafter is directed to the optical integrator 123. At thistime a plurality of secondary light sources are formed near the exitsurface of the optical integrator 123. The illumination light from thesesecondary light sources travels through the stop member 124 to becondensed by the condenser lens 125 and then the illumination light isdefined in the predetermined shape by the blind 127. After that, theillumination light travels through the imaging lens 128 to be reflectedby the bending mirror 129 toward the reticle 101. Subsequently, theillumination light passes through the pattern of the reticle 101 to beincident to the projection optical system 112. Then the illuminationlight passes through the projection optical system 112, so that thepattern is reduced into the predetermined size to be projected onto thesurface of the wafer 102, thus effecting exposure.

[0192] With the stepper of the present embodiment, the use of theexcimer laser oscillating apparatus of the first embodiment as a laserlight source permits the light emission of high-power excimer laserlight for a relatively long time, whereby the exposure can be carriedout quickly and accurately on the wafer 102.

[0193] Next described is an example of a method for producingsemiconductor apparatus (semiconductor devices) by use of the projectionexposure apparatus described referring to FIG. 15.

[0194]FIG. 16 shows a flow of production steps for producing thesemiconductor devices (such as semiconductor chips of IC, LSI, etc.,liquid-crystal panels, CCDs, or the like). First, step 1 (circuitdesign) is a step of designing circuits of the semiconductor devices.Step 2 (production of mask) is a step of producing a mask in which thecircuit pattern designed is formed. On the other hand, step 3(production of wafer) is a step of producing a wafer of a material suchas silicon or the like. Step 4 (wafer process) is called a pre-step inwhich actual circuits are formed on the wafer by the photolithographytechnology, using the mask and wafer prepared as described above. Nextstep 5 (assembly) is called a post step which is a step of formingsemiconductor chips from the wafer prepared in step 4 and which includessteps such as an assembly step (dicing, bonding), a packaging step(encapsulation of chip), and so on. Step 6 (inspection) is a step ofcarrying out inspection including an operation check test, a durabilitytest, and so on for the semiconductor devices produced in step 5. Thesemiconductor devices are completed through such steps and they areshipped (step 7).

[0195]FIG. 17 shows a detailed flow of the above wafer process. Step 11(oxidation) is a step of oxidizing the surface of the wafer. Step 12(CVD) is a step of forming an electroconductive film or an electricallyinsulating film on the wafer surface by vapor phase reaction. Step 13(PVD) is a step of forming an electroconductive film or an electricallyinsulating film on the wafer by sputtering or vapor deposition. Step 14(ion implantation) is a step of implanting ions into the wafer. Step 15(resist process) is a step of coating the wafer with a photosensitiveagent. Step 16 (exposure) is a step of printing the circuit pattern ofthe mask onto the wafer by the projection exposure apparatus describedabove. Step 17 (development) is a step of developing the exposed wafer.Step 18 (etching) is a step of etching away portions other than theresist image developed. Step 19 (peeling of resist) is a step ofremoving the resist which is now unnecessary after completion of theetching. These steps are carried out repeatedly to form multilayercircuit patterns on the wafer.

[0196] Use of this production method permits the semiconductor devicesof high integration, which were hard to produce heretofore, to beproduced readily and accurately at a high yield.

[0197] The present invention makes it possible to provide the gas supplypath structure (and the gas supply method) capable of suppressing theoccurrence of the shock wave while forming the high-speed flow close tothe sound speed in the simple structure. Particularly, when this gassupply path structure is applied to the excimer laser oscillatingapparatus, the apparatus can be replenished with the excimer laser gas,which is apt to be exhausted, without concern about the occurrence ofthe shock wave, and the apparatus can maintain the stable light emissionover a long time.

What is claimed is:
 1. A compressible fluid supply path structure, saidcompressible fluid supply path structure being of a convergent-divergentnozzle type, said compressible fluid supply path structure comprising: afluid inlet into which a compressible fluid is made to flow; a throatportion for controlling said compressible fluid to a speed less than asound speed; a fluid outlet of which said compressible fluid is made toflow out; and a circulation system for circulating said compressiblefluid flowing out of said fluid outlet, into said fluid inlet.
 2. Thecompressible fluid supply path structure according to claim 1, wherein aratio of a pressure at said fluid inlet to a pressure at said fluidoutlet is not less than a ratio of critical pressures.
 3. Thecompressible fluid supply path structure according to claim 1, which isshaped so as to decrease disturbance caused by said compressible fluid.4. The compressible fluid supply path structure according to claim 1,which is a structure without an inflection point.
 5. The compressiblefluid supply path structure according to claim 1, further comprising: atleast one pressure correcting means for correcting a pressure at saidfluid inlet or at said fluid outlet.
 6. The compressible fluid supplypath structure according to claim 5, wherein the correction for thepressure by said pressure correcting means is carried out near saidfluid inlet.
 7. The compressible fluid supply path structure accordingto claim 1, further comprising: at least one temperature correctingmeans for correcting a temperature at said fluid inlet or at said fluidoutlet.
 8. The compressible fluid supply path structure according toclaim 7, wherein said temperature correcting means has a coolingfunction and said cooling is effected near said fluid outlet.
 9. Thecompressible fluid supply path structure according to claim 1, furthercomprising: vertical width adjusting means for adjusting a verticalwidth of said throat portion.
 10. The compressible fluid supply pathstructure according to claim 1, which is symmetric with respect to saidthroat portion at the center.
 11. A compressible fluid supply pathstructure comprising: a fluid inlet into which a compressible fluid ismade to flow; a predetermined portion for controlling said compressiblefluid to a speed less than a sound speed; a fluid outlet of which saidcompressible fluid is made to flow out; at least one temperaturecorrecting means for correcting a temperature at said fluid inlet or atsaid fluid outlet; and a circulation system for circulating saidcompressible fluid flowing out of said fluid outlet, into said fluidinlet.
 12. The compressible fluid supply path structure according toclaim 11, wherein said temperature correcting means has a coolingfunction and said cooling is effected near said fluid outlet.
 13. Acompressible fluid supply method comprising: a step of making acompressible fluid flow into a fluid inlet of a compressible fluidsupply path structure of a convergent-divergent nozzle type; a step ofcontrolling said compressible fluid to a speed less than a sound speed,at a throat portion of said compressible fluid supply path structure; astep of making said compressible fluid flow out of a fluid outlet ofsaid compressible fluid supply path structure; and a circulation step ofcirculating said compressible fluid flowing out of said fluid outlet,into said fluid inlet by a circulation system.
 14. The compressiblefluid supply method according to claim 13, wherein said compressiblefluid supply path structure is arranged so that a ratio of a pressure atsaid fluid inlet to a pressure at said fluid outlet is not less than aratio of critical pressures.
 15. A compressible fluid supply methodcomprising: a step of making a compressible fluid flow into a fluidinlet of a compressible fluid supply path structure; a step ofcontrolling said compressible fluid to a speed less than a sound speed,at a predetermined portion of said compressible fluid supply pathstructure; a step of making said compressible fluid flow out of a fluidoutlet of said compressible fluid supply path structure; a step ofcorrecting at least one of temperatures at said fluid inlet and at saidfluid outlet by temperature correcting means of said compressible fluidsupply path structure; and a circulation step of circulating saidcompressible fluid flowing out of said fluid outlet, into said fluidinlet by a circulation system.
 16. The compressible fluid supply methodaccording to claim 15, wherein said temperature correcting means has acooling function and said cooling is effected near said fluid outlet.17. A laser oscillating apparatus comprising: a gas supply pathstructure for supplying a laser gas, said gas supply path structurebeing of a convergent-divergent nozzle type, said gas supply pathstructure comprising: a fluid inlet into which said laser gas is made toflow; a throat portion for controlling said laser gas to a speed lessthan a sound speed; and a fluid outlet of which said laser gas is madeto flow out.
 18. The laser oscillating apparatus according to claim 17,which comprises: said gas supply path structure for supplying said lasergas, said gas supply path structure further comprising: a circulationsystem for circulating said laser gas flowing out of said fluid outlet,into said fluid inlet.
 19. The laser oscillating apparatus according toclaim 17, which comprises: said gas supply path structure for supplyingsaid laser gas, said gas supply path structure being arranged so that aratio of a pressure at said fluid inlet to a pressure at said fluidoutlet is not less than a ratio of critical pressures.
 20. The laseroscillating apparatus according to claim 17, wherein said laser gas isan excimer laser gas which is a mixture of F₂ gas with at least oneinert gas selected from Kr, Ar, Ne, and He.
 21. The laser oscillatingapparatus according to claim 17, which comprises: said gas supply pathstructure for supplying said laser gas, said gas supply path structurebeing a structure without an inflection point.
 22. The laser oscillatingapparatus according to claim 17, which comprises: said gas supply pathstructure for supplying said laser gas, said gas supply path structurefurther comprising: at least one pressure correcting means forcorrecting a pressure at said fluid inlet or at said fluid outlet. 23.The laser oscillating apparatus according to claim 17, which comprises:said gas supply path structure for supplying said laser gas, said gassupply path structure further comprising: at least one temperaturecorrecting means for correcting a temperature at said fluid inlet or atsaid fluid outlet.
 24. The laser oscillating apparatus according toclaim 23, which comprises: said gas supply path structure for supplyingsaid laser gas, wherein said temperature correcting means has a coolingfunction and wherein said cooling is effected near said fluid outlet.25. The laser oscillating apparatus according to claim 17, whichcomprises: said gas supply path structure for supplying said laser gas,said gas supply path structure further comprising: vertical widthadjusting means for adjusting a vertical width of said throat portion.26. The laser oscillating apparatus according to claim 18, whichcomprises: said gas supply path structure for supplying said laser gas,wherein said circulation system is comprised of at least one bellowspump.
 27. The laser oscillating apparatus according to claim 18, whichcomprises: said gas supply path structure for supplying said laser gas,wherein said circulation system is comprised of at least one circulatingpump.
 28. The laser oscillating apparatus according to claim 18, whichcomprises: said gas supply path structure for supplying said laser gas,wherein said circulation system is comprised of at least one blower. 29.The laser oscillating apparatus according to claim 18, which comprises:said gas supply path structure for supplying said laser gas, whereinsaid circulation system is comprised of at least one Sirocco fan.
 30. Alaser oscillating apparatus comprising: a gas supply path structuregroup for supplying a laser gas, said gas supply path structure groupbeing of a shape of gas supply path structures of a convergent-divergentnozzle type connected in series, said gas supply path structure groupcomprising: a fluid inlet into which said laser gas is made to flow; acentral part for controlling said laser gas to a speed greater than asound speed; and a fluid outlet of which said laser gas is made to flowout.
 31. The laser oscillating apparatus according to claim 30, whichcomprises: said gas supply path structure group for supplying said lasergas, said gas supply path structure group further comprising: acirculation system for circulating said laser gas flowing out of saidfluid outlet, into said fluid inlet.
 32. The laser oscillating apparatusaccording to claim 30, wherein said laser gas is an excimer laser gaswhich is a mixture of F₂ gas with at least one inert gas selected fromKr, Ar, Ne, and He.
 33. The laser oscillating apparatus according toclaim 30, which comprises: said gas supply path structure group forsupplying said laser gas, said gas supply path structure group being astructure without an inflection point.
 34. The laser oscillatingapparatus according to claim 30, which comprises: said gas supply pathstructure group for supplying said laser gas, said gas supply pathstructure group further comprising: at least one pressure correctingmeans for correcting a pressure at said fluid inlet or at said fluidoutlet.
 35. The laser oscillating apparatus according to claim 30, whichcomprises: said gas supply path structure group for supplying said lasergas, said gas supply path structure group further comprising: at leastone temperature correcting means for correcting a temperature at saidfluid inlet or at said fluid outlet.
 36. The laser oscillating apparatusaccording to claim 30, which comprises: said gas supply path structuregroup for supplying said laser gas, said gas supply path structure groupfurther comprising: vertical width adjusting means for adjusting avertical width of said central portion.
 37. The laser oscillatingapparatus according to claim 31, which comprises: said gas supply pathstructure group for supplying said laser gas, wherein said circulationsystem is comprised of at least one bellows pump.
 38. The laseroscillating apparatus according to claim 31, which comprises: said gassupply path structure group for supplying said laser gas, wherein saidcirculation system is comprised of at least one circulating pump. 39.The laser oscillating apparatus according to claim 31, which comprises:said gas supply path structure group for supplying said laser gas,wherein said circulation system is comprised of at least one blower. 40.The laser oscillating apparatus according to claim 31, which comprises:said gas supply path structure group for supplying said laser gas,wherein said circulation system is comprised of at least one Siroccofan.
 41. An exposure apparatus comprising: a laser oscillatingapparatus, said laser oscillating apparatus generating illuminationlight, said laser oscillating apparatus comprising a gas supply pathstructure for supplying a laser gas, said gas supply path structurebeing of a convergent-divergent nozzle type, said gas supply pathstructure comprising: a fluid inlet into which said laser gas is made toflow; a throat portion for controlling said laser gas to a speed lessthan a sound speed; and a fluid outlet of which said laser gas is madeto flow out, a first optical system for radiating said illuminationlight from said laser oscillating apparatus onto a reticle in which apredetermined pattern is formed; and a second optical system forradiating said illumination light having passed through said reticle,onto a surface to be irradiated.
 42. An exposure apparatus comprising: alaser oscillating apparatus, said laser oscillating apparatus generatingillumination light, said laser oscillating apparatus comprising a gassupply path structure group for supplying a laser gas, said gas supplypath structure group being of a shape comprised of gas supply pathstructures of a convergent-divergent nozzle type connected in series,said gas supply path structure group comprising: a fluid inlet intowhich said laser gas is made to flow; a central part for controllingsaid laser gas to a speed greater than a sound speed; and a fluid outletof which said laser gas is made to flow out, a first optical system forradiating said illumination light from said laser oscillating apparatusonto a reticle in which a predetermined pattern is formed; and a secondoptical system for radiating said illumination light having passedthrough said reticle, onto a surface to be irradiated.
 43. A method forproducing a device, said method comprising: a step of coating a surfaceto be irradiated, with a photosensitive material; a step of effectingexposure of a predetermined pattern in said surface to be irradiated,coated with said photosensitive material, using the exposure apparatusas set forth in claim 41 or 42; and a step of developing saidphotosensitive material on said surface after the exposure.
 44. Themethod according to claim 43, wherein said surface to be irradiated is awafer surface and a semiconductor element is formed on said wafersurface.